The partially stabilized zirconia (PSZ) ceramic has wide applications due to its excellent mechanical toughness and chemically\ninert and electrical properties for fabricating various devices. In this paper, a novel high temperature pressure sensor with the\nPSZ was designed and fabricated. The sensor was designed based on the small deflection theory, which enables its theoretic\npressure-capacitance capability up to 60 bar. HTCC process technology was used to fabricate the sensor, which would realize a\ncompletely passive LC resonant circuit integrated on the ceramic substrate. According to the coupling principle, non contact testing\nis achieved using the designed readout system, with average sensitivity up to 38 kHz Bar?1 presented. Compared to the fabrication\nand measurement of traditional sensors, excellent packaging process is demonstrated, and the sensor can be completely tested from\n0 to 60bar.
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